Dark Field
Kratos SEMICONDUCTOR focuses on the research and development, manufacturing, sales, and after-sales integration services of semiconductor process equipment, providing one-stop solutions for semiconductor manufacturers' process equipment.
Keywords：
Semiconductor Equipment、Semiconductor Process
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Product Description
Dark Field detectors collect scattered light over a large angular range, which provides high sensitivity for detection of small defects. Particles, scratches, missing patterns, as well as other surface contamination and pattern anomalies on the surface of the wafer scatter the incident laser light in various understood patterns.
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