CDSEM
Kratos SEMICONDUCTOR focuses on the research and development, manufacturing, sales, and after-sales integration services of semiconductor process equipment, providing one-stop solutions for semiconductor manufacturers' process equipment.
Keywords:
Semiconductor Equipment、Semiconductor Process
Category:
Product Description
CD-SEMs (critical dimension scanning electron microscopes) are widely used as the main tool for CD measurement in semiconductor processes. In recent years they have helped in achieving improved precision for smaller design rules, and faster measurements for greater numbers of measurement points. New functions have also been implemented, such as automation of measurements through the effective utilization of design data, and measurement of hazardous locations using positional information.
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