TP630
Kratos SEMICONDUCTOR focuses on the research and development, manufacturing, sales, and after-sales integration services of semiconductor process equipment, providing one-stop solutions for semiconductor manufacturers' process equipment.
Keywords：
Semiconductor Equipment、Semiconductor Process
Category：
Product Description
TP630 uses a PUMP laser to heat the wafer surface, measures the thermal wave characteristics related to the degree of lattice damage through reflection, and indirectly calculates the TW value (infinity) that has a linear relationship with the ion implantation dose .
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